4 or 8 channel Mass-Flow-Controllers
Carnus MFC for mixing / supply of four gases for aeration of one or two SUBs / SUFs /P-SUBs. Designed for interaction with other Cronus-PCS units and even able to operate in a stand-alone application.
|
Product, model name |
Carnus MFC - mono |
Carnus MFC - stereo |
|
Purpose |
Gas mixing |
Gas mixing |
|
Channels |
4 |
8 |
|
Flow ranges, slpm |
0-1, 0-5, 0-10, 0-20 |
0-1, 0-5, 0-10, 0-20 |
|
Cabinet size |
U2 |
U2 |
|
Weight, kilo |
4 |
4 |
Design
Mono version integrates 4 x Mass-Flow-Controllers (MFC). Stereo version integrates 8 x MFCs modules and as to such able to supply two independently operating processes each with 4 different gases mixed for different flow. All programming and visual surveillance from 5" display or via smartphone, Pad or PC via build-in webserver. Or via Lucullus or Delta-V as the overall software in control of the processes via OPC-UA communication.
MFC modules fixed to an aluminum manifold for good thermal stability integrating pre-adjusted pressure regulators according to selected MFC unit. The manifold design allows possible exchange of flow range on each channel at any time. Independently select flow range on each channel. There is no hoses or to the gases exposed rubber of plastics inside Carnus.
In & Out (mono version)
- 24 VDC supply via Buccaneer socket and a EOS Power Supply
- Power on/off breaker
- 4 x 6 mm hose connection for gas supply (max 5 Bar)
- 1 x 6 mm hose connection for gas delivery
- USB
- RJ45
Communication
- 5” TFT display
- USB for Wi-Fi antenna and for software upgrades
- RJ45 TCP/IP LAN connection, OPC-UA communication
Carnus MFC in U2 Hephaestus Stainless Steel cabinet with four inlet and one outlet.
Price and p/n – look under Commerce
